Novel methods for the site specific preparation of micromechanical structures

S. Wurster; R. Treml; R. Fritz; M. W. Kapp; E. Langs; M. Alfreider; C. Ruhs; P. J. Imrich; G. Felber; D. Kiener

doi:10.3139/147.110331

Novel methods for the site specific preparation of micromechanical structures

S. Wurster, R. Treml, R. Fritz, M. W. Kapp, E. Langs, M. Alfreider, C. Ruhs, P. J. Imrich, G. Felber, D. Kiener

Chair of Materials Physics (430)

Research output: Contribution to journal › Article › Research › peer-review

15 Citations (Scopus)

Original language	English
Pages (from-to)	131-146
Number of pages	16
Journal	Practical metallography = Praktische Metallographie
Volume	52
Issue number	3
DOIs	https://doi.org/10.3139/147.110331
Publication status	Published - 2015

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title = "Novel methods for the site specific preparation of micromechanical structures",

author = "S. Wurster and R. Treml and R. Fritz and Kapp, {M. W.} and E. Langs and M. Alfreider and C. Ruhs and Imrich, {P. J.} and G. Felber and D. Kiener",

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AU - Wurster, S.

AU - Treml, R.

AU - Fritz, R.

AU - Kapp, M. W.

AU - Langs, E.

AU - Alfreider, M.

AU - Ruhs, C.

AU - Imrich, P. J.

AU - Felber, G.

AU - Kiener, D.

PY - 2015

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AN - SCOPUS:84928948481

SN - 0032-678X

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JO - Practical metallography = Praktische Metallographie

JF - Practical metallography = Praktische Metallographie

IS - 3

ER -

Novel methods for the site specific preparation of micromechanical structures

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