Novel methods for the site specific preparation of micromechanical structures

Stefan Wurster; Ruth Treml; Reinhard Fritz; Marlene W Kapp; Eva Langs; Markus Alfreider; Christian Ruhs; Peter J. Imrich; Gabriele Felber; Daniel Kiener

Novel methods for the site specific preparation of micromechanical structures

Stefan Wurster
, Ruth Treml
, Reinhard Fritz
, Marlene W Kapp
, Eva Langs
, Markus Alfreider
, Christian Ruhs
, Peter J. Imrich
, Gabriele Felber
, Daniel Kiener

Chair of Materials Physics (430)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Translated title of the contribution	Novel methods for the site specific preparation of micromechanical structures
Original language	English
Title of host publication	Fortschritte in der Metallographie
Pages	27-36
Publication status	Published - 2014

Cite this

@inproceedings{e4d5f5f4bee94085b3189d7aff914924,

title = "Novel methods for the site specific preparation of micromechanical structures",

author = "Stefan Wurster and Ruth Treml and Reinhard Fritz and Kapp, \{Marlene W\} and Eva Langs and Markus Alfreider and Christian Ruhs and Imrich, \{Peter J.\} and Gabriele Felber and Daniel Kiener",

year = "2014",

language = "English",

isbn = "978-3-88355-403-7",

pages = "27--36",

booktitle = "Fortschritte in der Metallographie",

}

TY - GEN

T1 - Novel methods for the site specific preparation of micromechanical structures

AU - Wurster, Stefan

AU - Treml, Ruth

AU - Fritz, Reinhard

AU - Kapp, Marlene W

AU - Langs, Eva

AU - Alfreider, Markus

AU - Ruhs, Christian

AU - Imrich, Peter J.

AU - Felber, Gabriele

AU - Kiener, Daniel

PY - 2014

Y1 - 2014

M3 - Conference contribution

SN - 978-3-88355-403-7

SP - 27

EP - 36

BT - Fortschritte in der Metallographie

ER -