Obtaining different orientation relationships for Cu films grown on (0001) alpha-Al2O3 substrates by magnetron sputtering

Gerhard Dehm, H. Edongué, T. Wagner, S.H. Oh, E. Arzt

Research output: Contribution to journal › Article › Research › peer-review

Translated title of the contribution	Obtaining different orientation relationships for Cu films grown on (0001) alpha-Al2O3 substrates by magnetron sputtering
Original language	English
Pages (from-to)	249-254
Journal	Zeitschrift für Metallkunde : international journal of materials research and advanced techniques
Volume	96
Publication status	Published - 2005

Cite this

@article{8210367275fd4da180b4a3b9486c8194,

title = "Obtaining different orientation relationships for Cu films grown on (0001) alpha-Al2O3 substrates by magnetron sputtering",

author = "Gerhard Dehm and H. Edongu{\'e} and T. Wagner and S.H. Oh and E. Arzt",

year = "2005",

language = "English",

volume = "96",

pages = "249--254",

journal = "Zeitschrift f{\"u}r Metallkunde : international journal of materials research and advanced techniques",

issn = "0179-4841",

publisher = "Hanser Publishers",

}

Research output: Contribution to journal › Article › Research › peer-review

TY - JOUR

T1 - Obtaining different orientation relationships for Cu films grown on (0001) alpha-Al2O3 substrates by magnetron sputtering

AU - Dehm, Gerhard

AU - Edongué, H.

AU - Wagner, T.

AU - Oh, S.H.

AU - Arzt, E.

PY - 2005

Y1 - 2005

M3 - Article

SN - 0179-4841

VL - 96

SP - 249

EP - 254

JO - Zeitschrift für Metallkunde : international journal of materials research and advanced techniques

JF - Zeitschrift für Metallkunde : international journal of materials research and advanced techniques

ER -