Oxidation and diffusion processes during annealing of AlCrVN hard coatings

Robert Franz, Jörg Neidhardt, Christian Mitterer, B. Schaffer, H. Hutter, R. Kaindl, Bernhard Sartory, Richard Tessadri, Markus Lechthaler, Peter Polcik

Research output: Contribution to journalArticleResearchpeer-review

14 Citations (Scopus)
Translated title of the contributionOxidation and diffusion processes during annealing of AlCrVN hard coatings
Original languageEnglish
Pages (from-to)302-308
JournalJournal of vacuum science & technology / A (JVST)
VolumeA26
DOIs
Publication statusPublished - 2008

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