Oxidation and wet etching behavior of sputtered ternary molybdenum films

Tanja Jörg, Anna Maria Hofer-Roblyek, Jörg Winkler, Christian Mitterer, Harald Köstenbauer

Research output: Contribution to conference › Presentation › Research

Original languageEnglish
Publication statusPublished - 2014
Event14th IMID -
Duration: 26 Aug 2014 → …

Conference

Conference14th IMID
Period26/08/14 → …
  • 1 Participation in conference

  • 14th IMID

    Tanja Jörg (Speaker)

    26 Aug 2014 → 29 Aug 2014

    Activity: Participating in or organising an event › Participation in conference

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