Oxidation and wet etching behavior of sputtered ternary molybdenum films

Tanja Jörg, Anna Maria Hofer-Roblyek, Jörg Winkler, Christian Mitterer, Harald Köstenbauer

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  • 14th IMID

    Tanja Jörg (Speaker)

    26 Aug 201429 Aug 2014

    Activity: Participating in or organising an eventParticipation in conference