Oxidation and wet etching behavior of sputtered ternary molybdenum films

Tanja Jörg, Anna Maria Hofer-Roblyek, Jörg Winkler, Christian Mitterer, Harald Köstenbauer

Research output: Contribution to conference › Presentation › Research

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14th IMID
Tanja Jörg (Speaker)
26 Aug 2014 → 29 Aug 2014
Activity: Participating in or organising an event › Participation in conference