Phase stability and decomposition products of Ti-Al-Ta-N thin films

Richard Rachbauer, David Holec, Paul Heinz Mayrhofer

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Translated title of the contribution	Phase stability and decomposition products of Ti-Al-Ta-N thin films
Original language	English
Pages (from-to)	151901-1-151901-3
Journal	Applied physics letters
Volume	97
Publication status	Published - 2010

Cite this

@article{53e5a91871974916ab9ffdc14a790fa0,

title = "Phase stability and decomposition products of Ti-Al-Ta-N thin films",

author = "Richard Rachbauer and David Holec and Mayrhofer, {Paul Heinz}",

year = "2010",

language = "English",

volume = "97",

pages = "151901--1--151901--3",

journal = "Applied physics letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

}