@article{085d9858148e461eb8071c1c0c8b922c,
title = "Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition",
keywords = "atomic layer deposition, piezoelectricity, thin films, zinc oxide",
author = "{Abu Ali}, Taher and Julian Pilz and Philipp Sch{\"a}ffner and Markus Kratzer and Christian Teichert and Barbara Stadlober and Coclite, {Anna Maria}",
year = "2020",
month = nov,
doi = "10.1002/pssa.202000319",
language = "English",
volume = "217",
journal = "Physica Status Solidi / A, Applications and Materials Science",
issn = "1862-6300",
publisher = "Wiley-VCH ",
number = "21",
}