Plasma CVD of alumina – unsolved problems

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Translated title of the contribution	Plasma CVD of alumina – unsolved problems
Original language	English
Pages (from-to)	141-145
Journal	Vacuum
Volume	80
DOIs	https://doi.org/10.1016/j.vacuum.2005.08.018
Publication status	Published - 2005

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@article{7e27cd3581a5425b9418d4fa2f11eb48,

title = "Plasma CVD of alumina – unsolved problems",

author = "J. Laimer and M. Fink and Christian Mitterer and H. St{\"o}ri",

year = "2005",

doi = "10.1016/j.vacuum.2005.08.018",

language = "English",

volume = "80",

pages = "141--145",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier Ltd",

}