Pulsed laser decomposition of silicon containing carbon thin films

J. M. Lackner, W. Waldhauser, R. Ebner, A. Fian, G. Jakopic, G. Leising, Thomas Schöberl

Research output: Contribution to journalArticleResearchpeer-review

11 Citations (Scopus)
Translated title of the contributionPulsed laser decomposition of silicon containing carbon thin films
Original languageEnglish
Pages (from-to)360-364
JournalSurface & coatings technology
Volume177-178
Publication statusPublished - 2004

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