Pulsed laser decomposition of silicon containing carbon thin films

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Translated title of the contribution	Pulsed laser decomposition of silicon containing carbon thin films
Original language	English
Pages (from-to)	360-364
Journal	Surface & coatings technology
Volume	177-178
Publication status	Published - 2004

Cite this

@article{624a8ccf17784349bbde6aa8dd189261,

title = "Pulsed laser decomposition of silicon containing carbon thin films",

author = "Lackner, \{J. M.\} and W. Waldhauser and R. Ebner and A. Fian and G. Jakopic and G. Leising and Thomas Sch{\"o}berl",

year = "2004",

language = "English",

volume = "177-178",

pages = "360--364",

journal = "Surface \& coatings technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}