Resolving depth evolution of microstructure and hardness in sputtered CrN film

Angelika Zeilinger; Rostislav Daniel; Thomas Schöberl; Mario Stefenelli; Bernhard Sartory; Jozef Keckes; Christian Mitterer

doi:10.1016/j.tsf.2014.10.106

Resolving depth evolution of microstructure and hardness in sputtered CrN film

Angelika Zeilinger, Rostislav Daniel, Thomas Schöberl, Mario Stefenelli, Bernhard Sartory, Jozef Keckes, Christian Mitterer

Research output: Contribution to journal › Article › Research › peer-review

11 Citations (Scopus)

Original language	English
Pages (from-to)	75-79
Journal	Thin solid films
Volume	581.2015
Issue number	April
DOIs	https://doi.org/10.1016/j.tsf.2014.10.106 https://doi.org/dx.doi.org/10.1016/j.tsf.2014.10.106
Publication status	Published - 2015

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title = "Resolving depth evolution of microstructure and hardness in sputtered CrN film",

author = "Angelika Zeilinger and Rostislav Daniel and Thomas Sch{\"o}berl and Mario Stefenelli and Bernhard Sartory and Jozef Keckes and Christian Mitterer",

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doi = "10.1016/j.tsf.2014.10.106",

language = "English",

volume = "581.2015",

pages = "75--79",

journal = "Thin solid films",

issn = "0040-6090",

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number = "April",

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TY - JOUR

T1 - Resolving depth evolution of microstructure and hardness in sputtered CrN film

AU - Zeilinger, Angelika

AU - Daniel, Rostislav

AU - Schöberl, Thomas

AU - Stefenelli, Mario

AU - Sartory, Bernhard

AU - Keckes, Jozef

AU - Mitterer, Christian

PY - 2015

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U2 - 10.1016/j.tsf.2014.10.106

DO - 10.1016/j.tsf.2014.10.106

M3 - Article

SN - 0040-6090

VL - 581.2015

SP - 75

EP - 79

JO - Thin solid films

JF - Thin solid films

IS - April

ER -

Resolving depth evolution of microstructure and hardness in sputtered CrN film

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