Translated title of the contribution | Limitierung der Spannungsmessung durch die Biegebalknemethode auf Grund thermisch aktivierter plastischer Verformung der Siliziumsubstrate |
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Original language | English |
Pages (from-to) | 68-75 |
Number of pages | 8 |
Journal | Surface & coatings technology |
Volume | 274 |
Publication status | Published - 25 Jul 2015 |
Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates
Research output: Contribution to journal › Article › Research › peer-review
11
Citations
(Scopus)