Restrictions of wafer curvature stress measurements by thermally induced plastic substrate deformation

Research output: Contribution to conference › Presentation › Research › peer-review

Original language	English
Publication status	Published - 2015
Event	E-MRS Spring Meeting 2015 - Lille, France Duration: 11 May 2015 → 15 May 2015

E-MRS Spring Meeting 2015
Saringer, C. (Speaker)
11 May 2015 → 15 May 2015
Activity: Participating in or organising an event › Participation in conference

Cite this

@conference{cfbda582b36a4046ad41090f8c252200,

title = "Restrictions of wafer curvature stress measurements by thermally induced plastic substrate deformation",

author = "Christian Saringer and Michael Tkadletz and Christian Mitterer",

year = "2015",

language = "English",

note = "E-MRS Spring Meeting 2015 ; Conference date: 11-05-2015 Through 15-05-2015",

}