Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties

Markus Kahn

Research output: ThesisDoctoral Thesis

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Abstract

The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (
Translated title of the contributionRaum-Temperatur Abscheidung von DLC-Schichten mit einer Ionenstrahlmethode, reaktivem Magnetronkathodenzerstäuben und gepulster Laser Dampfphasenabscheidung: Prozess-Design, Schichtstruktur und Schichteigenschaften
Original languageEnglish
QualificationDr.mont.
Supervisors/Advisors
  • Teichert, Christian, Assessor B (internal)
  • Mitterer, Christian, Assessor A (internal)
Publication statusPublished - 2009

Bibliographical note

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Keywords

  • Amorphous Carbon Films (a-C)
  • Physical Vapour Deposition (PVD)
  • Magnetron Sputtering
  • Pulsed Laser Deposition (PLD)
  • Raman Spectroscopy

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