Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

Petr Vita, Doris Prieling, Helfried Steiner, Bernhard Gschaider, Markus Junk, Frank Holsteyns, Felix Staudegger, Christiane Lechner, Hendrik C. Kuhlmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
776 Downloads (Pure)
Translated title of the contributionSimulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers
Original languageEnglish
Title of host publicationMAS 2011 CD-ROM Proceedings
Pages149-154
Publication statusPublished - 2011

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