Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

Petr Vita; Doris Prieling; Helfried Steiner; Bernhard Gschaider; Markus Junk; Frank Holsteyns; Felix Staudegger; Christiane Lechner; Hendrik C. Kuhlmann

Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

Petr Vita
, Doris Prieling
, Helfried Steiner
, Bernhard Gschaider
, Markus Junk
, Frank Holsteyns
, Felix Staudegger
, Christiane Lechner
, Hendrik C. Kuhlmann

Chair of Geoenergy Production Engineering (550)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

1336 Downloads (Pure)

Translated title of the contribution	Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers
Original language	English
Title of host publication	MAS 2011 CD-ROM Proceedings
Pages	149-154
Publication status	Published - 2011

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Simulations of Liquid Film Flows with Free Surface on Rotating Silicon WafersAccepted author manuscript, 641 KB

Cite this

@inproceedings{c8ae4794aeb54984a56a7db21658424d,

title = "Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers",

author = "Petr Vita and Doris Prieling and Helfried Steiner and Bernhard Gschaider and Markus Junk and Frank Holsteyns and Felix Staudegger and Christiane Lechner and Kuhlmann, \{Hendrik C.\}",

year = "2011",

language = "English",

isbn = "978-88-903724-5-2",

pages = "149--154",

booktitle = "MAS 2011 CD-ROM Proceedings",

}

TY - GEN

T1 - Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

AU - Vita, Petr

AU - Prieling, Doris

AU - Steiner, Helfried

AU - Gschaider, Bernhard

AU - Junk, Markus

AU - Holsteyns, Frank

AU - Staudegger, Felix

AU - Lechner, Christiane

AU - Kuhlmann, Hendrik C.

PY - 2011

Y1 - 2011

M3 - Conference contribution

SN - 978-88-903724-5-2

SP - 149

EP - 154

BT - MAS 2011 CD-ROM Proceedings

ER -