Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power

Christian Saringer, A. D. Pajdarova, Pawel Baroch, Katrin Zorn, Robert Franz, Christian Mitterer

Research output: Contribution to conference › Poster › Research › peer-review

Original language	English
Publication status	Published - 2017
Event	44th IOP Plasma Physics Conference - Worcester College, Oxford, United Kingdom Duration: 3 Apr 2017 → 6 Apr 2017

Conference	44th IOP Plasma Physics Conference
Country/Territory	United Kingdom
City	Oxford
Period	3/04/17 → 6/04/17

Cite this

@conference{fb549e6c471641a49b99322dbe5b0ad6,

title = "Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power",

author = "Christian Saringer and Pajdarova, {A. D.} and Pawel Baroch and Katrin Zorn and Robert Franz and Christian Mitterer",

year = "2017",

language = "English",

note = "44th IOP Plasma Physics Conference ; Conference date: 03-04-2017 Through 06-04-2017",

}