Sputtered MoAlTi thin films with improved oxidation behavior for display applications

Roland Lorenz, Tanja Jörg, Christian Mitterer, Michael O'Sullivan, Jörg Winkler

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)47-53
Number of pages7
JournalSVC Bulletin
Volume2020
Issue numberSpring
Publication statusPublished - 2020

Cite this