Sputtered molybdenum films: structure and property evolution with film thickness

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Translated title of the contribution	Sputtered molybdenum films: structure and property evolution with film thickness
Original language	English
Pages (from-to)	149-152
Journal	Vacuum
Volume	99
DOIs	https://doi.org/10.1016/j.vacuum.2013.05.018
Publication status	Published - 2014

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@article{87bf8d35900d4eacbd7f6318459619b2,

title = "Sputtered molybdenum films: structure and property evolution with film thickness",

author = "Hofer, \{Anna Maria\} and Josef Schlacher and Jozef Keckes and J{\"o}rg Winkler and Christian Mitterer",

year = "2014",

doi = "10.1016/j.vacuum.2013.05.018",

language = "English",

volume = "99",

pages = "149--152",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier Ltd",

}

TY - JOUR

T1 - Sputtered molybdenum films: structure and property evolution with film thickness

AU - Hofer, Anna Maria

AU - Schlacher, Josef

AU - Keckes, Jozef

AU - Winkler, Jörg

AU - Mitterer, Christian

PY - 2014

Y1 - 2014

U2 - 10.1016/j.vacuum.2013.05.018

DO - 10.1016/j.vacuum.2013.05.018

M3 - Article

SN - 0042-207X

VL - 99

SP - 149

EP - 152

JO - Vacuum

JF - Vacuum

ER -