Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters

Stefan Massl, H. Köstenbauer, Jozef Keckes, Reinhard Pippan

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Translated title of the contribution	Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters
Original language	English
Pages (from-to)	8655-8662
Journal	Thin solid films
Volume	516
Publication status	Published - 2008

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@article{c8457481fc1644579982897942726d98,

title = "Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters",

author = "Stefan Massl and H. K{\"o}stenbauer and Jozef Keckes and Reinhard Pippan",

year = "2008",

language = "English",

volume = "516",

pages = "8655--8662",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier",

}