Structural and mechanical evolution of reactively and non-reactively sputterd Zr-Al-N thin films during annealing

P.H. Mayrhofer, Doris Sonnleitner, M. Bartosik, David Holec

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Translated title of the contribution	Structural and mechanical evolution of reactively and non-reactively sputterd Zr-Al-N thin films during annealing
Original language	English
Pages (from-to)	52-56
Journal	Surface & coatings technology
Volume	244
DOIs	https://doi.org/10.1016/j.surfcoat.2014.01.049
Publication status	Published - 2014

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title = "Structural and mechanical evolution of reactively and non-reactively sputterd Zr-Al-N thin films during annealing",

author = "P.H. Mayrhofer and Doris Sonnleitner and M. Bartosik and David Holec",

year = "2014",

doi = "10.1016/j.surfcoat.2014.01.049",

language = "English",

volume = "244",

pages = "52--56",

journal = "Surface & coatings technology",

issn = "0257-8972",

publisher = "Elsevier",

}

TY - JOUR

T1 - Structural and mechanical evolution of reactively and non-reactively sputterd Zr-Al-N thin films during annealing

AU - Mayrhofer, P.H.

AU - Sonnleitner, Doris

AU - Bartosik, M.

AU - Holec, David

PY - 2014

Y1 - 2014

U2 - 10.1016/j.surfcoat.2014.01.049

DO - 10.1016/j.surfcoat.2014.01.049

M3 - Article

SN - 0257-8972

VL - 244

SP - 52

EP - 56

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -