Structural and mechanical properties of dc and pulsed dc reactive magnetron sputtered V2O5 films

Nazanin Fateh, Gerardo Fontalvo, Christian Mitterer

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Translated title of the contribution	Structural and mechanical properties of dc and pulsed dc reactive magnetron sputtered V2O5 films
Original language	English
Pages (from-to)	7716-7719
Journal	Journal of physics / D, Applied physics
Volume	40
DOIs	https://doi.org/10.1088/0022-3727/40/24/019
Publication status	Published - 2007

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title = "Structural and mechanical properties of dc and pulsed dc reactive magnetron sputtered V2O5 films",

author = "Nazanin Fateh and Gerardo Fontalvo and Christian Mitterer",

year = "2007",

doi = "10.1088/0022-3727/40/24/019",

language = "English",

volume = "40",

pages = "7716--7719",

journal = "Journal of physics / D, Applied physics",

issn = "0022-3727",

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TY - JOUR

T1 - Structural and mechanical properties of dc and pulsed dc reactive magnetron sputtered V2O5 films

AU - Fateh, Nazanin

AU - Fontalvo, Gerardo

AU - Mitterer, Christian

PY - 2007

Y1 - 2007

U2 - 10.1088/0022-3727/40/24/019

DO - 10.1088/0022-3727/40/24/019

M3 - Article

SN - 0022-3727

VL - 40

SP - 7716

EP - 7719

JO - Journal of physics / D, Applied physics

JF - Journal of physics / D, Applied physics

ER -