Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source

M. Kahn, M. Cekada, T Schoeberl, R. Berghauser, Christian Mitterer, C. Bauer, W Waldhauser, E. Brandstätter

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Translated title of the contribution	Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source
Original language	English
Pages (from-to)	6502-6507
Journal	Thin solid films
Volume	517
Publication status	Published - 2009

Cite this

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title = "Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source",

author = "M. Kahn and M. Cekada and T Schoeberl and R. Berghauser and Christian Mitterer and C. Bauer and W Waldhauser and E. Brandst{\"a}tter",

year = "2009",

language = "English",

volume = "517",

pages = "6502--6507",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier",

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TY - JOUR

T1 - Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source

AU - Kahn, M.

AU - Cekada, M.

AU - Schoeberl, T

AU - Berghauser, R.

AU - Mitterer, Christian

AU - Bauer, C.

AU - Waldhauser, W

AU - Brandstätter, E.

PY - 2009

Y1 - 2009

M3 - Article

SN - 0040-6090

VL - 517

SP - 6502

EP - 6507

JO - Thin solid films

JF - Thin solid films

ER -