Structure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique

Jörg Paulitsch, Paul Heinz Mayrhofer, W.-D. Münz, M. Schenkel

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Translated title of the contribution	Structure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique
Original language	English
Pages (from-to)	1239-1244
Journal	Thin solid films
Volume	517
DOIs	https://doi.org/10.1016/j.tsf.2008.06.080
Publication status	Published - 2008

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@article{01af0ea08a2d447093a3a15726798f83,

title = "Structure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique",

author = "J{\"o}rg Paulitsch and Mayrhofer, {Paul Heinz} and W.-D. M{\"u}nz and M. Schenkel",

year = "2008",

doi = "10.1016/j.tsf.2008.06.080",

language = "English",

volume = "517",

pages = "1239--1244",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Structure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique

AU - Paulitsch, Jörg

AU - Mayrhofer, Paul Heinz

AU - Münz, W.-D.

AU - Schenkel, M.

PY - 2008

Y1 - 2008

U2 - 10.1016/j.tsf.2008.06.080

DO - 10.1016/j.tsf.2008.06.080

M3 - Article

SN - 0040-6090

VL - 517

SP - 1239

EP - 1244

JO - Thin solid films

JF - Thin solid films

ER -