Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films

A. Flink, J.M. Andersson, B. Alling, Rostislav Daniel, J. Sjölen, L. Karlsson, L. Hultmann

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Translated title of the contribution	Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films
Original language	English
Pages (from-to)	714-721
Journal	Thin solid films
Volume	517
DOIs	https://doi.org/10.1016/j.tsf.2008.08.126
Publication status	Published - 2008

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title = "Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films",

author = "A. Flink and J.M. Andersson and B. Alling and Rostislav Daniel and J. Sj{\"o}len and L. Karlsson and L. Hultmann",

year = "2008",

doi = "10.1016/j.tsf.2008.08.126",

language = "English",

volume = "517",

pages = "714--721",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films

AU - Flink, A.

AU - Andersson, J.M.

AU - Alling, B.

AU - Daniel, Rostislav

AU - Sjölen, J.

AU - Karlsson, L.

AU - Hultmann, L.

PY - 2008

Y1 - 2008

U2 - 10.1016/j.tsf.2008.08.126

DO - 10.1016/j.tsf.2008.08.126

M3 - Article

SN - 0040-6090

VL - 517

SP - 714

EP - 721

JO - Thin solid films

JF - Thin solid films

ER -