Structure evolution in reactively sputtered  molybdenum oxide thin films

Julia Pachlhofer; Christoph Jachs; Robert Franz; Enrico Franzke; H. Köstenbauer; Jörg Winkler; Christian Mitterer

doi:http://dx.doi.org/10.1016/j.vacuum.2016.07.002

Structure evolution in reactively sputtered molybdenum oxide thin films

Julia Pachlhofer, Christoph Jachs, Robert Franz, Enrico Franzke, H. Köstenbauer, Jörg Winkler, Christian Mitterer

PLANSEE SE

Research output: Contribution to journal › Article › Research › peer-review

26 Citations (Scopus)

Original language	English
Pages (from-to)	246-251
Number of pages	6
Journal	Vacuum
Issue number	131
DOIs	https://doi.org/10.1016/j.vacuum.2016.07.002
Publication status	Published - 2016

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http://dx.doi.org/10.1016/j.vacuum.2016.07.002

Cite this

@article{4330ca23263e4966816d8ed21f6e4a82,

title = "Structure evolution in reactively sputtered molybdenum oxide thin films",

keywords = "Molybdenum oxide, Thin film, MoO2, MoO3, Reactive sputtering",

author = "Julia Pachlhofer and Christoph Jachs and Robert Franz and Enrico Franzke and H. K{\"o}stenbauer and J{\"o}rg Winkler and Christian Mitterer",

year = "2016",

doi = "http://dx.doi.org/10.1016/j.vacuum.2016.07.002",

language = "English",

pages = "246--251",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier",

number = "131",

}

TY - JOUR

T1 - Structure evolution in reactively sputtered molybdenum oxide thin films

AU - Pachlhofer, Julia

AU - Jachs, Christoph

AU - Franz, Robert

AU - Franzke, Enrico

AU - Köstenbauer, H.

AU - Winkler, Jörg

AU - Mitterer, Christian

PY - 2016

Y1 - 2016

KW - Molybdenum oxide

KW - Thin film

KW - MoO2

KW - MoO3

KW - Reactive sputtering

U2 - http://dx.doi.org/10.1016/j.vacuum.2016.07.002

DO - http://dx.doi.org/10.1016/j.vacuum.2016.07.002

M3 - Article

SN - 0042-207X

SP - 246

EP - 251

JO - Vacuum

JF - Vacuum

IS - 131

ER -