Structure of sputtered nanocomposite CrCx/a-C:H thin films

Gert Gassner, Jörg Patscheider, Paul Heinz Mayrhofer, E. Hegedus, L. Toth, I. Kovacs, B. Pecz, V. Srot, Christina Scheu, Christian Mitterer

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43 Citations (Scopus)
Translated title of the contributionStructure of sputtered nanocomposite CrCx/a-C:H thin films
Original languageEnglish
Pages (from-to)1837-1843
JournalJournal of vacuum science & technology / B (JVST)
Volume24
DOIs
Publication statusPublished - 2006

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