Translated title of the contribution | Structure of sputtered nanocomposite CrCx/a-C:H thin films |
---|---|
Original language | English |
Pages (from-to) | 1837-1843 |
Journal | Journal of vacuum science & technology / B (JVST) |
Volume | 24 |
DOIs | |
Publication status | Published - 2006 |
Structure of sputtered nanocomposite CrCx/a-C:H thin films
Gert Gassner, Jörg Patscheider, Paul Heinz Mayrhofer, E. Hegedus, L. Toth, I. Kovacs, B. Pecz, V. Srot, Christina Scheu, Christian Mitterer
Research output: Contribution to journal › Article › Research › peer-review
43
Citations
(Scopus)