Structure of sputtered nanocomposite CrCx/a-C:H thin films

Gert Gassner; Jörg Patscheider; Paul Heinz Mayrhofer; E. Hegedus; L. Toth; I. Kovacs; B. Pecz; V. Srot; Christina Scheu; Christian Mitterer

doi:10.1116/1.2216713

Structure of sputtered nanocomposite CrCx/a-C:H thin films

Gert Gassner
, Jörg Patscheider
, Paul Heinz Mayrhofer
, E. Hegedus
, L. Toth
, I. Kovacs
, B. Pecz
, V. Srot
, Christina Scheu
, Christian Mitterer

Chair of Physical Metallurgy (420)

Research output: Contribution to journal › Article › Research › peer-review

43 Citations (Scopus)

Translated title of the contribution	Structure of sputtered nanocomposite CrCx/a-C:H thin films
Original language	English
Pages (from-to)	1837-1843
Journal	Journal of vacuum science & technology / B (JVST)
Volume	24
DOIs	https://doi.org/10.1116/1.2216713
Publication status	Published - 2006

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10.1116/1.2216713

Cite this

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title = "Structure of sputtered nanocomposite CrCx/a-C:H thin films",

author = "Gert Gassner and J{\"o}rg Patscheider and Mayrhofer, \{Paul Heinz\} and E. Hegedus and L. Toth and I. Kovacs and B. Pecz and V. Srot and Christina Scheu and Christian Mitterer",

year = "2006",

doi = "10.1116/1.2216713",

language = "English",

volume = "24",

pages = "1837--1843",

journal = "Journal of vacuum science \& technology / B (JVST)",

issn = "0734-211X",

publisher = "American Institute of Physics",

}

TY - JOUR

T1 - Structure of sputtered nanocomposite CrCx/a-C:H thin films

AU - Gassner, Gert

AU - Patscheider, Jörg

AU - Mayrhofer, Paul Heinz

AU - Hegedus, E.

AU - Toth, L.

AU - Kovacs, I.

AU - Pecz, B.

AU - Srot, V.

AU - Scheu, Christina

AU - Mitterer, Christian

PY - 2006

Y1 - 2006

U2 - 10.1116/1.2216713

DO - 10.1116/1.2216713

M3 - Article

SN - 0734-211X

VL - 24

SP - 1837

EP - 1843

JO - Journal of vacuum science & technology / B (JVST)

JF - Journal of vacuum science & technology / B (JVST)

ER -