Original language | English |
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Pages (from-to) | 54-58 |
Journal | Thin solid films |
Publication status | Published - 1996 |
Studies on the morphology of Al2O3 thin films grown by Atomic Layer Epitaxy
Thomas Prohaska, M. Ritala, H. Saloniemi, M. Leskelä, G FRIEDBACHER
Research output: Contribution to journal › Article › Research › peer-review
52
Citations
(Scopus)