Studies on the morphology of Al2O3 thin films grown by Atomic Layer Epitaxy

Thomas Prohaska, M. Ritala, H. Saloniemi, M. Leskelä, G FRIEDBACHER

Research output: Contribution to journalArticleResearchpeer-review

52 Citations (Scopus)
Original languageEnglish
Pages (from-to) 54-58
JournalThin solid films
Publication statusPublished - 1996

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