Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films

J.D. Pedarnig; K. Siraj; M.A. Bodea; I. Puica; W. Lang; R. Kolarova; P. Bauer; K. Haselgrübler; C. Hasenfuss; Igor Beinik; Christian Teichert

doi:10.1016/j.tsf.2010.07.021

Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films

J.D. Pedarnig
, K. Siraj
, M.A. Bodea
, I. Puica
, W. Lang
, R. Kolarova
, P. Bauer
, K. Haselgrübler
, C. Hasenfuss
, Igor Beinik
, Christian Teichert

Chair of Physics (460)

Research output: Contribution to journal › Article › Research › peer-review

18 Citations (Scopus)

Translated title of the contribution	Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films
Original language	English
Pages (from-to)	7075-7080
Journal	Thin solid films
Volume	518
DOIs	https://doi.org/10.1016/j.tsf.2010.07.021
Publication status	Published - 2010

Access to Document

10.1016/j.tsf.2010.07.021

Cite this

@article{b55fbac6b81b416eaff5c7c35481dc6d,

title = "Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films",

author = "J.D. Pedarnig and K. Siraj and M.A. Bodea and I. Puica and W. Lang and R. Kolarova and P. Bauer and K. Haselgr{\"u}bler and C. Hasenfuss and Igor Beinik and Christian Teichert",

year = "2010",

doi = "10.1016/j.tsf.2010.07.021",

language = "English",

volume = "518",

pages = "7075--7080",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films

AU - Pedarnig, J.D.

AU - Siraj, K.

AU - Bodea, M.A.

AU - Puica, I.

AU - Lang, W.

AU - Kolarova, R.

AU - Bauer, P.

AU - Haselgrübler, K.

AU - Hasenfuss, C.

AU - Beinik, Igor

AU - Teichert, Christian

PY - 2010

Y1 - 2010

U2 - 10.1016/j.tsf.2010.07.021

DO - 10.1016/j.tsf.2010.07.021

M3 - Article

SN - 0040-6090

VL - 518

SP - 7075

EP - 7080

JO - Thin solid films

JF - Thin solid films

ER -