Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films

Thomas Prohaska, M. Ritala, M. Leskelä, L. Niinistö, G FRIEDBACHER, M GRASSERBAUER

Research output: Contribution to journal › Article › Research › peer-review

46 Citations (Scopus)

Cite this

@article{90cdefbe950c40d9bd0f41d48b430837,

title = "Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films",

author = "Thomas Prohaska and M. Ritala and M. Leskel{\"a} and L. Niinist{\"o} and G FRIEDBACHER and M GRASSERBAUER",

year = "1994",

language = "English",

pages = " 155--162",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier",

}