Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0 0 0 1) structure

Jozef Keckes, S. Six, J.W. Gerlach, B. Rauschenbach

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Translated title of the contribution	Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0 0 0 1) structure
Original language	English
Pages (from-to)	119-123
Journal	Journal of crystal growth
Volume	262
Publication status	Published - 2004

Cite this

@article{664d4c8d2ef447bfbb73630d797af876,

title = "Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0 0 0 1) structure",

author = "Jozef Keckes and S. Six and J.W. Gerlach and B. Rauschenbach",

year = "2004",

language = "English",

volume = "262",

pages = "119--123",

journal = "Journal of crystal growth",

issn = "0022-0248",

publisher = "Elsevier B.V.",

}