The deposition of metastable (Ti,Al)N coatings by thermal CVD

Viktoria Edlmayr

Research output: ThesisDiploma Thesis


Modern industrial products demand for high economic efficiency, production optimization and quality. In this context, the cutting tool industry has to create developments regarding a significant reduction of production times and cycle times. In practice, cutting tools are subjected to wear caused by abrasion, adhesion, oxidation, and surface fatigue. The requirements on cutting tools for a high durability are a high hardness and toughness, chemical inertness against the environment and workpiece material, for instance. TiN coatings have been studied because of its many applications due to the hardness, good thermal conductivity, resistance against corrosion as well as the pleasant golden color. Specific properties of TiN can be improved by incorporation of a third element in the film. Coatings of (Ti,Al)N are an evolutionary development of TiN, created to enhance the properties of TiN, such as oxidation resistance and hardness. The purpose of this thesis was the deposition of coatings within the system Ti-Al-N by thermal chemical vapor deposition (CVD). CVD is a widely used process to coat cemented carbide tools. The deposition experiments comprised the variation of the deposition temperature and composition of reactive gases, which lead to varying contents of Al, for instance. The coatings have been characterized with respect to their phase composition, structure as well as mechanical and tribological properties.
Translated title of the contributionAbscheidung von metastabilen (Ti,Al)N Hartstoffschichten mittels thermischem CVD
Original languageEnglish
Awarding Institution
  • Montanuniversität
  • Mitterer, Christian, Supervisor (internal)
Award date15 Dec 2006
Publication statusPublished - 2006

Bibliographical note

embargoed until null


  • Chemical vapor deposition (CVD)
  • Titanium Aluminum Nitride
  • Ti-Al-N
  • Structure
  • Tribology

Cite this