The effect of boron doping on thermal CVD of alumina

D Hochauer, Christian Mitterer, M Penoy, C Michotte, H.-P. Martinz, Martin Kathrein

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Translated title of the contributionThe effect of boron doping on thermal CVD of alumina
Original languageEnglish
Title of host publicationproc. 17th International Plansee Seminar
Pages1-10
Publication statusPublished - 2009

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