The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings

Josef Wagner, Christian Mitterer, M. Penoy, C. Michotte, Wilfried Wallgram, Martin Kathrein

Research output: Contribution to journal › Article › Research › peer-review

58 Citations (Scopus)

Translated title of the contribution	The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings
Original language	English
Pages (from-to)	120-126
Journal	International journal of refractory metals & hard materials
Volume	26
DOIs	https://doi.org/10.1016/j.ijrmhm.2007.01.010
Publication status	Published - 2008

Access to Document

@article{b0147d8c47f84673b162d4664ae03590,

title = "The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings",

author = "Josef Wagner and Christian Mitterer and M. Penoy and C. Michotte and Wilfried Wallgram and Martin Kathrein",

year = "2008",

doi = "10.1016/j.ijrmhm.2007.01.010",

language = "English",

volume = "26",

pages = "120--126",

journal = "International journal of refractory metals & hard materials",

issn = "0263-4368",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings

AU - Wagner, Josef

AU - Mitterer, Christian

AU - Penoy, M.

AU - Michotte, C.

AU - Wallgram, Wilfried

AU - Kathrein, Martin

PY - 2008

Y1 - 2008

U2 - 10.1016/j.ijrmhm.2007.01.010

DO - 10.1016/j.ijrmhm.2007.01.010

M3 - Article

SN - 0263-4368

VL - 26

SP - 120

EP - 126

JO - International journal of refractory metals & hard materials

JF - International journal of refractory metals & hard materials

ER -