The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices

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Translated title of the contribution	The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices
Original language	English
Pages (from-to)	94-100
Journal	Thin solid films
Volume	565
DOIs	https://doi.org/10.1016/j.tsf.2014.06.051
Publication status	Published - 2014

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@article{c1fad23e6e9b42aeb10e5f9082bde220,

title = "The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices",

author = "Vipin Chawla and David Holec and Paul Mayrhofer",

year = "2014",

doi = "10.1016/j.tsf.2014.06.051",

language = "English",

volume = "565",

pages = "94--100",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices

AU - Chawla, Vipin

AU - Holec, David

AU - Mayrhofer, Paul

PY - 2014

Y1 - 2014

U2 - 10.1016/j.tsf.2014.06.051

DO - 10.1016/j.tsf.2014.06.051

M3 - Article

SN - 0040-6090

VL - 565

SP - 94

EP - 100

JO - Thin solid films

JF - Thin solid films

ER -