The effect of the discharge power on target poisoning and microstructure - property relations of reactively sputtered TiN coatings

Research output: Contribution to conference › Poster › Research

Original language	English
Publication status	Published - Dec 2015
Event	MIATEC RSD 2015 - CNAM, Paris, France Duration: 8 Dec 2015 → 11 Dec 2015

MIATEC RSD 2015
Saringer, C. (Participant)
8 Dec 2015 → 11 Dec 2015
Activity: Participating in or organising an event › Participation in conference

Cite this

@conference{e8e82d486b38494ea32883fbacd178dc,

title = "The effect of the discharge power on target poisoning and microstructure - property relations of reactively sputtered TiN coatings",

author = "Christian Saringer and Robert Franz and Katrin Zorn and Christian Mitterer",

year = "2015",

month = dec,

language = "English",

note = "MIATEC RSD 2015 ; Conference date: 08-12-2015 Through 11-12-2015",

}