The femtosecond laser micro-processing of the field-emission tip arrays in single crystal CeB6

Ning Zhou, Wei Zhang, Xin Zhang, Hongliang Liu, Qingmei Liu, Yixin Xiao, Yanqin Liu, Shengli Jin, Ning Liao

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2 Citations (Scopus)


The field-emission tip arrays (FEAs) in single crystal cerium-hexaboride (CeB 6) were micro-processed by femtosecond laser. The results show that the femtosecond laser has no damage to the surface structure and phase of the CeB 6 FEAs, and the FEA with the curvature radius of the optimal tips of about 0.6 μm and the height of about 5 μm have uniform morphology and the best field-emission performance. The single crystal CeB 6 FEAs had good emission stability under the following conditions: the starting electric field of 2.8 V/μm and an emission current density of 0.98 A/cm 2 at an electric field of 7.7 V/μm. The calculations of material removal threshold and finite element simulation of the temperature field substantiate that laser peak energy density F 0=0.95 J/cm 2 is in good agreement with the theoretical calculation result (0.51 J/cm 2≤F 0 ≤ 2.12 J/cm 2). Finally, the best process parameter range of this experiment is obtained. These results further indicating that the femtosecond laser micro-processing is an effective method to develop the vacuum field-emission application of single crystal CeB 6.

Original languageEnglish
Article number109929
Number of pages8
Publication statusPublished - Feb 2021

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© 2020 Elsevier Ltd


  • Cerium-hexaboride (CeB )
  • Femtosecond laser
  • Field-emission tip arrays (FEAs)
  • Finite element simulation
  • Removal threshold

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