The micromechanical characterization of silicon up to 950

Gerald Josef Kamillo Schaffar, Daniel Tscharnuter, Peter Julian Imrich, Verena Maier-Kiener

Research output: Contribution to conference › Poster › Research

Original language	English
Publication status	Published - 2022
Event	Infineon meets University 2022 - Infineon Hauptquartier Campeon, München, Germany Duration: 24 Nov 2022 → 24 Nov 2022

Cite this

@conference{e476c095ded54027a84e701994069bf1,

title = "The micromechanical characterization of silicon up to 950",

author = "Schaffar, {Gerald Josef Kamillo} and Daniel Tscharnuter and Imrich, {Peter Julian} and Verena Maier-Kiener",

year = "2022",

language = "English",

note = "Infineon meets University 2022 ; Conference date: 24-11-2022 Through 24-11-2022",

}