The origin of stresses in magnetron-sputtered thin films with zone T structures

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Translated title of the contribution	The origin of stresses in magnetron-sputtered thin films with zone T structures
Original language	English
Pages (from-to)	2621-2633
Journal	Acta materialia
Volume	58
DOIs	https://doi.org/10.1016/j.actamat.2009.12.048
Publication status	Published - 2010

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@article{3e40a22d583a4a8680604aae6cd6b614,

title = "The origin of stresses in magnetron-sputtered thin films with zone T structures",

author = "Rostislav Daniel and Klaus Martinschitz and Jozef Keckes and Christian Mitterer",

year = "2010",

doi = "10.1016/j.actamat.2009.12.048",

language = "English",

volume = "58",

pages = "2621--2633",

journal = "Acta materialia",

issn = "1359-6454",

publisher = "Acta Materialia Inc",

}

TY - JOUR

T1 - The origin of stresses in magnetron-sputtered thin films with zone T structures

AU - Daniel, Rostislav

AU - Martinschitz, Klaus

AU - Keckes, Jozef

AU - Mitterer, Christian

PY - 2010

Y1 - 2010

U2 - 10.1016/j.actamat.2009.12.048

DO - 10.1016/j.actamat.2009.12.048

M3 - Article

SN - 1359-6454

VL - 58

SP - 2621

EP - 2633

JO - Acta materialia

JF - Acta materialia

ER -