The origin of stresses in magnetron sputtered thin films

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Translated title of the contribution	The origin of stresses in magnetron sputtered thin films
Original language	English
Title of host publication	Proceedings of 4th International Conference on Surface, coatings and Nanostructured Materials
Pages	44-44
Publication status	Published - 2009

Cite this

@inproceedings{cffc1631c5404a8494f83849d72ebfee,

title = "The origin of stresses in magnetron sputtered thin films",

author = "Rostislav Daniel and Christian Mitterer and K.J. Martinschitz and Jozef Keckes",

year = "2009",

language = "English",

pages = "44--44",

booktitle = "Proceedings of 4th International Conference on Surface, coatings and Nanostructured Materials",

}