The Phase Transformation of Silicon Assessed by an Unloading Contact Pressure Approach

Gerald Josef Kamillo Schaffar, Johann Kappacher, Daniel Tscharnuter, Verena Maier-Kiener

Research output: Contribution to journalArticleResearchpeer-review


Silicon is of great economic importance for the semiconductor industry as well as of academic interest because of its high-pressure phase transformations. These transformations also occur during the indentation of silicon. To further investigate these transformations, a modified method using the continuous stiffness measurement (CSM) during unloading is presented in this work. The use of the CSM signal allows directly calculating the mean contact pressure while unloading. The measurements will be compared to conventional indentation tests and data from high-pressure cell experiments reported in the literature. Furthermore, the influence of constant load holding segments on the phase transformation during unloading is investigated.
Original languageEnglish
Pages (from-to)2220-2230
Number of pages11
Issue number6
Early online date18 Apr 2022
Publication statusPublished - 18 Apr 2022

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