The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties

Martin Rausch; Asaf Sabag; Karl-Heinz Pichler; Georg Gruber; Judith Köstenbauer; Harald Köstenbauer; Patrice Kreiml; Megan J. Cordill; Jörg Winkler; Christian Mitterer

doi:10.1016/j.surfcoat.2019.125174

The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties

Martin Rausch
, Asaf Sabag
, Karl-Heinz Pichler
, Georg Gruber
, Judith Köstenbauer
, Harald Köstenbauer
, Patrice Kreiml
, Megan J. Cordill
, Jörg Winkler
, Christian Mitterer

Chair of Functional Materials and Materials Systems (425)

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Article number	125174
Number of pages	14
Journal	Surface & coatings technology
Volume	381.2020
Issue number	15 January
Early online date	18 Nov 2019
DOIs	https://doi.org/10.1016/j.surfcoat.2019.125174
Publication status	Published - 2019

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10.1016/j.surfcoat.2019.125174

Cite this

Rausch, M., Sabag, A., Pichler, K.-H., Gruber, G., Köstenbauer, J., Köstenbauer, H., Kreiml, P., Cordill, M. J., Winkler, J., & Mitterer, C. (2019). The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties. Surface & coatings technology, 381.2020(15 January), Article 125174. https://doi.org/10.1016/j.surfcoat.2019.125174

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title = "The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties",

author = "Martin Rausch and Asaf Sabag and Karl-Heinz Pichler and Georg Gruber and Judith K{\"o}stenbauer and Harald K{\"o}stenbauer and Patrice Kreiml and Cordill, \{Megan J.\} and J{\"o}rg Winkler and Christian Mitterer",

year = "2019",

doi = "10.1016/j.surfcoat.2019.125174",

language = "English",

volume = "381.2020",

journal = "Surface \& coatings technology",

issn = "0257-8972",

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Rausch, M, Sabag, A, Pichler, K-H, Gruber, G, Köstenbauer, J, Köstenbauer, H, Kreiml, P, Cordill, MJ, Winkler, J & Mitterer, C 2019, 'The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties', Surface & coatings technology, vol. 381.2020, no. 15 January, 125174. https://doi.org/10.1016/j.surfcoat.2019.125174

TY - JOUR

T1 - The sputter performance of an industrial-scale planar Mo-target over ist lifetime

T2 - Target erosion and film properties

AU - Rausch, Martin

AU - Sabag, Asaf

AU - Pichler, Karl-Heinz

AU - Gruber, Georg

AU - Köstenbauer, Judith

AU - Köstenbauer, Harald

AU - Kreiml, Patrice

AU - Cordill, Megan J.

AU - Winkler, Jörg

AU - Mitterer, Christian

PY - 2019

Y1 - 2019

U2 - 10.1016/j.surfcoat.2019.125174

DO - 10.1016/j.surfcoat.2019.125174

M3 - Article

SN - 0257-8972

VL - 381.2020

JO - Surface & coatings technology

JF - Surface & coatings technology

IS - 15 January

M1 - 125174

ER -