Thermal decomposition of Ti1-xAlxN thin films in the focus of 3D-atom probe, transmission electron microscopy and X-ray diffraction

Richard Rachbauer, S. Massl, Erich Stergar, J. Keckes, Paul Heinz Mayrhofer

Research output: Contribution to conferencePosterResearchpeer-review

Translated title of the contributionThermal decomposition of Ti1-xAlxN thin films in the focus of 3D-atom probe, transmission electron microscopy and X-ray diffraction
Original languageEnglish
Publication statusPublished - 2010
EventInternational Workshop on In situ characterization of near-surface processes - Eisenerz, Austria
Duration: 30 May 20103 Jun 2010

Conference

ConferenceInternational Workshop on In situ characterization of near-surface processes
Country/TerritoryAustria
CityEisenerz
Period30/05/103/06/10

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