Thermal decomposition of Ti1-xAlxN thin films in the focus of 3D-atom probe, transmission electron microscopy and X-ray diffraction

Research output: Contribution to conference › Poster › Research › peer-review

Translated title of the contribution	Thermal decomposition of Ti1-xAlxN thin films in the focus of 3D-atom probe, transmission electron microscopy and X-ray diffraction
Original language	English
Publication status	Published - 2010
Event	International Workshop on In situ characterization of near-surface processes - Eisenerz, Austria Duration: 30 May 2010 → 3 Jun 2010

Conference	International Workshop on In situ characterization of near-surface processes
Country/Territory	Austria
City	Eisenerz
Period	30/05/10 → 3/06/10

Cite this

@conference{6bd77fcfa1dc452fb8b02ab36ec0ca26,

title = "Thermal decomposition of Ti1-xAlxN thin films in the focus of 3D-atom probe, transmission electron microscopy and X-ray diffraction",

author = "Richard Rachbauer and S. Massl and Erich Stergar and J. Keckes and Mayrhofer, \{Paul Heinz\}",

year = "2010",

language = "English",

note = "International Workshop on In situ characterization of near-surface processes ; Conference date: 30-05-2010 Through 03-06-2010",

}

Thermal decomposition of Ti1-xAlxN thin films in the focus of 3D-atom probe, transmission electron microscopy and X-ray diffraction. / Rachbauer, Richard; Massl, S.; Stergar, Erich et al.
2010. Poster session presented at International Workshop on In situ characterization of near-surface processes, Eisenerz, Austria.

Research output: Contribution to conference › Poster › Research › peer-review

TY - CONF

T1 - Thermal decomposition of Ti1-xAlxN thin films in the focus of 3D-atom probe, transmission electron microscopy and X-ray diffraction

AU - Rachbauer, Richard

AU - Massl, S.

AU - Stergar, Erich

AU - Keckes, J.

AU - Mayrhofer, Paul Heinz

PY - 2010

Y1 - 2010

M3 - Poster

T2 - International Workshop on In situ characterization of near-surface processes

Y2 - 30 May 2010 through 3 June 2010

ER -