Thermal decomposition routes of CrN hard coatings synthesized by reactive arc evaporation and magnetron sputtering

  • Wolfgang Ernst
  • , Jörg Neidhardt
  • , Herbert Willmann
  • , B. Sartory
  • , Paul Heinz Mayrhofer
  • , Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

48 Citations (Scopus)
Translated title of the contributionThermal decomposition routes of CrN hard coatings synthesized by reactive arc evaporation and magnetron sputtering
Original languageEnglish
Pages (from-to)568-574
JournalThin solid films
Volume517
DOIs
Publication statusPublished - 2008

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