Thermal stability of magnetron sputtered Zr–Si–N films

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41 Citations (Scopus)

Translated title of the contribution	Thermal stability of magnetron sputtered Zr–Si–N films
Original language	English
Pages (from-to)	3368-3376
Journal	Surface & coatings technology
Volume	201
DOIs	https://doi.org/10.1016/j.surfcoat.2006.07.206 https://doi.org/10.1016/j.surfcoat.2006.07.206
Publication status	Published - 2006

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@article{24c58b484b1541e1b9b553d63f8efe49,

title = "Thermal stability of magnetron sputtered Zr–Si–N films",

author = "R. Daniel and J. Musil and P. Zeman and C. Mitterer",

year = "2006",

doi = "10.1016/j.surfcoat.2006.07.206",

language = "English",

volume = "201",

pages = "3368--3376",

journal = "Surface \& coatings technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Thermal stability of magnetron sputtered Zr–Si–N films

AU - Daniel, R.

AU - Musil, J.

AU - Zeman, P.

AU - Mitterer, C.

PY - 2006

Y1 - 2006

UR - https://www.scopus.com/pages/publications/33750973045

U2 - 10.1016/j.surfcoat.2006.07.206

DO - 10.1016/j.surfcoat.2006.07.206

M3 - Article

SN - 0257-8972

VL - 201

SP - 3368

EP - 3376

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -