Thermal Stability of Sputtered W-Si-N Coatings

K. Fadenberger, C. Rebholz, M.A. Baker, Rostislav Daniel, J. Musil, Paul Heinz Mayrhofer, Christian Mitterer

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Translated title of the contribution	Thermal Stability of Sputtered W-Si-N Coatings
Original language	English
Title of host publication	34 th International Conference on Metallurgical Coatings and Thin Films
Pages	36-36
Publication status	Published - 2007

Cite this

@inproceedings{21333ff1d6de428c8bb792ed6ab2edf9,

title = "Thermal Stability of Sputtered W-Si-N Coatings",

author = "K. Fadenberger and C. Rebholz and M.A. Baker and Rostislav Daniel and J. Musil and Mayrhofer, {Paul Heinz} and Christian Mitterer",

year = "2007",

language = "English",

pages = "36--36",

booktitle = "34 th International Conference on Metallurgical Coatings and Thin Films",

}