Thermo-mechanical behaviour of Mo-Ag thin films

Claus Othmar Wolfgang Trost

Research output: ThesisMaster's Thesis

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Abstract

In this work, the thermo-mechanical behaviour, the evolution of phases of thin films consisting of the immiscible system Molybdenum-Silver (Mo-Ag) were investigated. The 40 nm to 770 nm thick films were deposited via a dc magnetron sputtering process on rigid (Silicon) and flexible (Polyimide) substrates. The compositions ranged from 9 at.% to pure silver films, with a focus on the Mo-rich films. It was observed that differences in terms of composition and film thickness in the rigid system led to differences in thermo-mechanical behaviour. These differences were evaluated using different annealing treatments in a wafer curvature system and then they were used to interpret the behaviour of the flexible counterparts. Via X-Ray diffraction it was observed that phases ranged from metastable phases before annealing and after annealing to segregated Mo-rich and Ag-rich phases. The surface evolution was found to evolve with increasing silver content and with both time and temperature.
Translated title of the contributionThermo-mechanisches Verhalten von dünnen Mo-Ag Filmen
Original languageEnglish
QualificationDipl.-Ing.
Awarding Institution
  • Montanuniversität
Supervisors/Advisors
  • Cordill, Megan, Supervisor (internal)
  • Keckes, Jozef, Co-Supervisor (internal)
Award date14 Dec 2018
DOIs
Publication statusPublished - 2018

Bibliographical note

embargoed until 18-09-2023

Keywords

  • Mo
  • Ag
  • Molybdenum
  • Silver
  • thin films
  • immiscible
  • sputtering
  • flexible
  • thermo-mechanical
  • wafer curvature
  • annealing
  • X-Ray diffraction
  • Synchrotron
  • metastable phases

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